Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 53(3); 2020
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2020;53(3):109-115. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2020.53.3.109

Characteristics of a Polycrystalline Diamond Thin Film Deposited on a-plane Sapphire Substrate

  • Tan, Xing Yan;Jang, Tae Hwan;Kwon, Jin Uk;Kim, Tae Gyu;
    Department of Nano Fusion Technology, Pusan National University;Department of Nano Fusion Technology, Pusan National University;Department of Nano Fusion Technology, Pusan National University;Department of Nanomechatronics Engineering, Pusan National Univ
Abstract

In this study, polycrystalline diamond was synthesized by chemical vapor deposition (CVD). Diamond films were deposited on a-plane sapphire substrates while changing the concentration of methane for hydrogen (CH4/H2), and the concent

Keywords a-plane sapphire substrate;Polycrystalline Diamond;MPECVD;Raman spectra;XRD;AFM;