Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 53(4); 2020
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2020;53(4):169-181. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2020.53.4.169

A brief review on the effect of impurities on the atomic layer deposited fluorite-structure ferroelectrics

  • Lee, Dong Hyun;Yang, Kun;Park, Ju Yong;Park, Min Hyuk;
    Department of Materials Science and Engineering, Pusan National University;Department of Materials Science and Engineering, Pusan National University;Department of Materials Science and Engineering, Pusan National University;Department of Materials Scienc
Abstract

The ferroelectricity in emerging fluorite-structure oxides such as HfO2 and ZrO2 has attracted increasing interest since 2011. Different from conventional ferroelectrics, the fluorite-structure ferroelectrics could be reliably scaled

Keywords Ferroelectric;Impurity;Polymorphism;$HfO_2$;$ZrO_2$;