Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 53(4); 2020
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2020;53(4):190-199. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2020.53.4.190

Influence of Applied Current Density on Properties of Cu thin layer Electrodeposited from Copper Pyrophosphate Bath

  • Yoon, Pilgeun;Park, Deok-Yong;
    Department of Advanced Materials Engineering, Hanbat National University;Department of Advanced Materials Engineering, Hanbat National University;
Abstract

Copper pyrophosphate baths were employed in order to study the dependencies of current efficiency, residual stress, surface morphology and microstructure of electrodeposited Cu thin layers on applied current density. The current efficiency was obtained to

Keywords Electrodeposition;Cu thin layer;pyrophosphate bath;thin film properties;current density;