Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 53(6); 2020
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2020;53(6):306-311. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2020.53.6.306

Mechanical Properties of DLC Films and Duplex Plasma Nitriding/DLC Coating Treatment Process

  • Park, Hyun-Jun;Kim, Min-Chae;Kim, Sang-Sub;Moon, Kyoung-Il;
    Heat Treatment R&D Group, Korea Institute of Industrial Technology;Dongbu electronic materials Co., Ltd.;Department of Materials Science and Engineering, Inha University;Heat Treatment R&D Group, Korea Institute of Industrial Technology;
Abstract

In this work, diamond-like carbon (DLC) films are coated onto plasma nitrided AISI 4140 steel by DC-pulsed PECVD. One problem of DLC films is their very poor adhesion on steel substrates. The purpose of the nitriding was to enhance adhesion between the su

Keywords Plasma nitriding;DLC;Duplex treatment;Adhesion force;