Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 54(1); 2021
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2021;54(1):25-29. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2021.54.1.25

Study on the narrowed nanopores of anodized aluminum oxide template by thin-film deposition using e-beam evaporation

  • Lee, Seung-Hun;Lee, Minyoung;Kim, Chunjoong;Kim, Kwanoh;Yoon, Jae Sung;Yoo, Yeong-Eun;Kim, Jeong Hwan;
    Department of Nano Manufacturing Technology, Korea Institute of Machinery and Materials;Department of Nano Manufacturing Technology, Korea Institute of Machinery and Materials;Department of Materials Science and Engineering, Chungnam National University;D
Abstract

The fabrication of nanopore membrane by deposition of Al2O3 film using electron-beam evaporation, which is fast, cost-effective, and negligible dependency on substance material, is investigated for potential applications in water purification and sensors.

Keywords Nanopore membrane;Anodic aluminum oxide(AAO);Thin-film deposition;Electron-beam evaporation;