Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 54(2); 2021
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2021;54(2):53-61. Published online: Dec, 24, 2021

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DOI : 10.5695/JKISE.2021.54.2.53

Optimization of tetrahedral amorphous carbon (ta-C) film deposited with filtered cathodic vacuum arc through Taguchi robust design

  • Seung-Yun Kwak a,b , Young-Jun Jang b , Hojun Ryu a,b , Jisoo Kimc,d , and Jongkuk Kimb*
    aDepartment of mechanical engineering, Pusan National University (PNU), Busan 46241, Korea b Extreme Environmental Coating Department, Korea Institute of Materials Science (KIMS), Changwon, 51508, Korea dDepartment of Advanced Science and Technology Conve
Abstract

The properties of tetrahedral amorphous Carbon (ta-C) film can be determined by multiple parameters and comprehensive effects of those parameters during a deposition process with filtered cathodic vacuum arc (FCVA). In this study, Taguchi method was ado

Keywords Filtered cathodic vacuum arc (FCVA); Taguchi robust design; Tetrahedral amorphous carbon (ta-C);Diamond like carbon (DLC)