Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 54(3); 2021
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2021;54(3):133-138. Published online: Jan, 3, 2022

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DOI : 10.5695/JKISE.2021.54.3.133

Effect of Negative Substrate Bias Voltage on the Microstructure and Mechanical Properties of Nanostructured Ti–Al–N–O Coatings Prepared by Cathodic Arc Evaporation

  • Sungbo Heo, Wang Ryeol Kim and In-Wook Park*
    Korea Institute of Industrial Technology (KITECH), Yangsan 50623, Republic of Korea
Abstract

Ternary Ti–X–N coatings, where X = Al, Si, Cr, O, etc., have been widely used for machining tools and cutting tools such as inserts, end-mills, and etc. Ti–Al–N–O coatings were deposited onto silicon wafer and WC-Co substrates by a cathodic arc evaporati

Keywords Ti–Al–N–O Coatings, Substrate bias voltage, Cathodic arc evaporation, Microstructure