Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 54(6); 2021
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2021;54(6):302-306. Published online: Jan, 6, 2022

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DOI : 10.5695/JKISE.2021.54.6.302

The Effect of electron beam surface irradiation on the properties of SnO2/Ag/SnO2 thin films

  • Jin-Kyu Janga,†, Hyun-Jin Kima, Jae-Wook Choia, Yeon-Hak Leea, Young-Min Konga, Sung-Bo Heob, Yu-Sung Kimc,†, Daeil Kima,*
    a School of Materials Science and Engineering, University of Ulsan, Ulsan 44776, Korea b Korea Institute of Industrial Technology, Yangsan 50635, Korea c Korea Institute of Industrial Technology, Ulsan 44413, Korea
Abstract

SnO2 30/Ag 15/SnO2 30 nm(SAS) tri-layer films were deposited on the glass substrates with RF and DC magnetron sputtering and then electron beam is irradiated on the surface to investigate the effect of electron bombardment on the opto-electrical perform

Keywords SnO2, Ag, Electron irradiation, X-ray diffraction, Figure of merit