Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 54(6); 2021
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2021;54(6):348-356. Published online: Jan, 6, 2022

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DOI : 10.5695/JKISE.2021.54.6.348

A Study on Nitrogen Doping of Graphene Based on Optical Diagnosis of Horizontal Inductively Coupled Plasma

  • Sung-Il Jo and Goo-Hwan Jeong*
    Department of Advanced Materials Science and Engineering, Graduate School of Kangwon National University, Chuncheon 24341, Republic of Korea
Abstract

In this study, optical diagnosis of plasma was performed for nitrogen doping in graphene using a horizontal inductively coupled plasma (ICP) system. Graphene was prepared by mechanical exfoliation and the ICP system using nitrogen gas was ignited for plas

Keywords Graphene, Defect-suppressed doping, Inductively coupled plasma, Optical emission spectroscopy, Electron excitation temperature