Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 54(6); 2021
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2021;54(6):357-364. Published online: Jan, 6, 2022

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DOI : 10.5695/JKISE.2021.54.6.357

Effect of fluorine gas addition for improvement of surface wear property of DLC thin film deposited by using PECVD

  • Hyun-Jun Parkab, Jun-Hyung Kimc, Kyoung-Il Moona,*
    aHeat Treatment R&D Group, Korea Institute of Industrial Technology, Gyeounggi-do 150014, Korea bDepartment of Materials Science and Engineering, Inha University, Incheon 22212, Korea cPoongsan Co., Ltd.,
Abstract

In this study, DLC films deposited by PECVD were evaluated to the properties of super-hydrophobic by CF4 treatment. The structure of DLC films were confirmed by Raman Spectra whether or not mixed sp3 (like diamond) peak and sp2 (like graphite) peak. And t

Keywords PECVD, F-DLC, Super-hydrophobic, CF4