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Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 54(6); 2021
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2021;54(6):365-370. Published online: Jan, 6, 2022

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DOI : 10.5695/JKISE.2021.54.6.365

Influence of Plasma Corrosion Resistance of Y2O3 Coated Parts by Cleaning Process

  • Minjoong Kima,b, Jae-Soo Shinc, Ju-Young Yunb,d,*
    aDepartment of Electrical Engineering, Hanyang University, Seoul, 04763, Republic of Korea bVacuum Materials Measurement Team, Korea Research Institute of Standards and Science, Daejeon, 34113, Republic of Korea cDepartment of Energy&Advanced Material
Abstract

In this research, we proceeded with research on plasma resistance of the cleaning process of APS(Atmospheric Plasma Spray)-Y2O3 coated parts used for semiconductor and display plasma process equipment. CF4, O2, and Ar mixed gas were used for the plasma e

Keywords Plasma corrosion resistance, Spray coating, Cleaning, Contamination particle