Oct, 31, 2024

Vol.57 No.5

Current Issue Archives
Search
Advanced Search
Editorial Office

Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 55(2); 2022
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2022;55(2):77-83. Published online: May, 2, 2022

PDF Full Text XML

DOI : 10.5695/JSSE.2022.55.2.77

Relationship between inductively coupled plasma and crystal structure, mechanical and electrical properties of MoN coatings

  • Hoon Jang and Sung-Yong Chun*
    Department of Advanced Materials Science and Engineering, Mokpo National University, Jeonnam 58554, Korea
Abstract

Nanocrystalline MoN coatings were prepared by inductively coupled plasma magnetron sputtering (ICPMS) changing the plasma power from 0 W to 200 W. The properties of the coatings were analyzed by x-ray diffraction, field emission scanning electron microsco

Keywords Inductively coupled plasma; Υ-Mo2N; Crystal structure; Roughness; Electrical resistivity