Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 15(3); 1982
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1982;15(3):138-145. Published online: Nov, 30, -0001

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The Chemical Vapor Deposition of TiN on Cemented Tungsten Carbide Cutting Tools

  • 이상래;
    부산대학교 공과대학 금속공학과;
Abstract

The effects of the simultaneous variations of the ratio of feed gases(H2/N2 Flow ratio), feed gas flow rate (H2/N2, total-flow rate) and partial pressures of TiCl4 (PTiCl41) as well as deposition time and cobalt content of the substrate on the deposition

Keywords