Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 55(5); 2022
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2022;55(5):284-291. Published online: Nov, 14, 2022

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DOI : 10.5695/JSSE.2022.55.5.284

ZnO/Cu/Al2O3 transparent heaters fabricated by magnetron sputtering

  • Changheum Min, Dooho Choi*
    School of Advanced Materials Engineering, Dong-Eui University, Busan 47340, Republic of Korea
Abstract

Herein, we studied ultrathin Cu-layer-based transparent heaters embedded between a ZnO underlayer and an Al2O3 overlayer. The anti-reflecting functions for the ZnO and Al2O3 layers by independently varying the layer thicknesses, with the Cu layer thicknes

Keywords