Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 55(6); 2022
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2022;55(6):353-362. Published online: Dec, 29, 2022

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DOI : 10.5695/JSSE.2022.55.6.353

A study on the high transparent and antistatic thin films on sodalime glass by reactive pulsed DC magnetron sputtering

  • Jong-Gook Jung, Sil-Mook Lim*
    Department of Advanced Materials Engineering, Tech University of Korea, Gyeonggi 15073, Korea
Abstract

Recently, transmittance of photomasks for ultra-violet (UV) region is getting more important, as the light source wavelength of an exposure process is shortened due to the demand for technologies about high integration and miniaturization of devices. Mean

Keywords Reactive DC magnetron sputtering, Antireflection coatings, Antistatic coatings, Transparent conductive coatings, Electrostatic damage.