Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 55(6); 2022
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2022;55(6):363-367. Published online: Dec, 29, 2022

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DOI : 10.5695/JSSE.2022.55.6.363

Influence of electron irradiation on the structural and optoelectronics properties of ZTZ thin films prepared by magnetron sputtering

  • Byung-Chul Chaa,†, Jin-Kyu Jangb,†, Jin-Young Choia,b, In-Sik Leea, Dae-Wook Kima, Yu-Sung Kima, Daeil Kimb,*
    aAdvanced Forming Processes R&D Group, Korea Institute of Industrial Technology, Ulsan 44413, Republic of Korea bSchool of Materials Science and Engineering, University of Ulsan, Ulsan 44776, Korea
Abstract

Transparent ZnO/Ti/ZnO (ZTZ) tri-layered films were prepared with radio frequency (RF) and direct current (DC) magnetron sputtering on the glass substrate. The thickness of the ZnO and Ti films was kept at 50 and 10 nm to consider the effect of the electr

Keywords ZnO, Ti, XRD, AFM, Figure of merit.