Oct, 31, 2024

Vol.57 No.5

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  • The Korean Society of Surface Science and Engineering
  • Volume 56(5); 2023
  • Article

Review

The Korean Society of Surface Science and Engineering 2023;56(5):328-334. Published online: Oct, 31, 2023

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DOI : 10.5695/JSSE.2023.56.5.328

The effect of mechanical properties of carbon-based thin film on plasma nitrided injection mold steel

  • Hye-Min Kima, Dae-Wook Kimb*
    aDepartment of Materials Chemistry, Shinshu University, Nagano 380-8553, Japan bAdvanced Manufacturing Process R&D Group, Ulsan Division, Korea Institute of Industrial Technology, 55, Jongga-ro, Jung-gu, Ulsan, 44313, Korea
Abstract

The carbon-based films have various properties, which have been widely applied in industrial application. However, it has critical drawback for poor adhesion between films and metal substrate. In the present work, we have deposited carbon-based films on injection mold steel by plasma assisted chemical vapor deposition (PACVD). In order to improve adhesion, prior to film deposition, the substrate was nitriding-treated using PACVD. And its effect on the adhesion was investigated. Due to the pre-nitriding, the amorphous carbon nitride (a-CN:H) films presented 10 times higher adhesion (34.9 N) than that of un-nitirided. In addition, a friction coefficient was decreased from 0.29 to 0.15 for the amorphous carbon (a-C:H) due to improved adhesion. The obtained results demonstrated that pre-nitriding considerably improved the adhesion, and the relationship among adhesion, hardness, and surface roughness was discussed in detail.

Keywords Plasma assistant chemical vapor deposition, Adhesion, Amorphous carbon nitride