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Review

  • The Korean Society of Surface Science and Engineering
  • Volume 56(6); 2023
  • Article

Review

The Korean Society of Surface Science and Engineering 2023;56(6):341-352. Published online: Dec, 28, 2023

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DOI : 10.5695/JSSE.2023.56.6.341

Rotary CVD Process for Surface Treatment of Powders

  • Jong-Hwan Leea and Goo-Hwan Jeonga,b,*
    a Interdisciplinary Program in Advanced Functional Materials and Devices Development, Kangwon National University, Chuncheon 24341, Korea b Department of Battery Convergence Engineering, Kangwon National University, Chuncheon 24341, Korea
Abstract

This paper reviews the potentials of a rotary chemical vapor deposition (RCVD) process for nanomaterial synthesis and coating on powder-based materials. The rotary reactor offers a significant improvement over traditional CVD methods having horizontal and fixed reaction chambers. The RCVD system yields enhanced productivity and surface coating uniformity of nanoparticles applied in various purposes, such as efficient heat dissipation, surface hardness enhancement, and enhanced energy storage performances. The effectiveness of the RCVD system would open up new possibilities in various applications because uniform coating on powder-based materials with massive productivity is inevitable to develop multi-functional materials with high reliability.

Keywords Thermal chemical vapor deposition; Rotary chemical vapor deposition; Powder coating; Mass production.