Oct, 31, 2024

Vol.57 No.5

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Review

  • The Korean Society of Surface Science and Engineering
  • Volume 57(1); 2024
  • Article

Review

The Korean Society of Surface Science and Engineering 2024;57(1):38-48. Published online: Feb, 28, 2024

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DOI : doi.org/10.5695/JSSE.2024.57.1.38

Highly ordered In2O3 zig-zag nanocolumns for selective detection of acetone

  • Jae Han Chunga, Ho-Gyun Kima, Yun-Haeng Choa, Junho Hwangb, See-Hyung Parka, Sungwoo Sohnb, Su Bin Junga, Eunsol Leea, Kwangjae Leec,*, Young-Seok Shima,*
    aSchool of Energy, Materials and Chemical Engineering, Korea University of Technology and Education, Cheonan, 31253, Republic of Korea bDepartment of Materials Science and Engineering, Yonsei University, 50 Yonseiro, Seodaemun-gu, Seoul, 03722, Republic of Korea cDepartment of Information Security Engineering, Sangmyung University Cheonan, 31066, Republic of Korea
Abstract

We fabricated In2O3 zig-zag nanocolumns(ZZNCs) by oblique angle deposition method based on e-beam evaporator for highly sensitive and selective CH3COCH3 sensor. Our results indicate that as the ZZNCs layer stacks, the gas response also increases. In comparison to thin films, ZZNCs at 5 layer show a 117-fold enhancement in gas response and a rapid response time (~2 s). When measured with various gases, it showed a high selectivity towards acetone. Under conditions of R.H. 80%, exposure to CH3COCH3 gas theoretically indicated a detection limit of 1.2 part-per-billion(ppb). These results suggest the potential of In2O3 ZZNCs as a breath analyzer for the diagnosis of diabetes.

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