Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 18(1); 1985
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1985;18(1):5-11. Published online: Nov, 30, -0001

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Study on Ti Deposition Rate from $TiI_4$ on Stainless Steel

  • Yoo, Jae-Keun;Han, Jun-Su;Paik, Young-Hyun;
    Dept. of Metallurgical Engineering, Korea Univ.;Dept. of Metallurgical Engineering, Korea Univ.;Dept. of Metallurgical Engineering, Korea Univ.;
Abstract

Titanium was deposited onto AISI-430 stainless steel by chemical vapor deposition from $TiI_4;and;H_2$ gas mixture. Effects of temperature, flow rate of the gas, and $TiI_4$ partial pressure on the deposition rate were thoroughly inv

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