Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 19(2); 1986
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1986;19(2):51-58. Published online: Nov, 30, -0001

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Kinetic Model on the Vacuum Deposition

  • Kim, Dae-Soo;
    Korea Institute of Energy and Resources;
Abstract

A theoretical model was proposed to predict the rate of particles impinging on the negatively biased substrate and the total kinetic energy per unit time. The model takes into an account of kinetic theory based on Maxwell statistics and elementary plasma

Keywords