Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 20(2); 1987
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1987;20(2):43-48. Published online: Nov, 30, -0001

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The Change of Physical Properties of Thin Metal Film with than Evaporating Incident Angles

  • Jin, Hui-Chang;Jo, Hyeon-Chun;Baek, Su-Hyeon;
    Dep`t of Materials Eng. HanYang Univ.;Dep`t of Materials Eng. HanYang Univ.;Dep`t of Materials Eng. HanYang Univ.;
Abstract

Chromium and Aluminum films were deposited by evaporation technique in $3{ imes}10^{-6}$ mbar vacuum level at the incident angles ranging from $0^{circ};to;60^{circ}$ with various evaporation rates. We measured the sheet resistances

Keywords