Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 21(3); 1988
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1988;21(3):114-129. Published online: Nov, 30, -0001

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Physical Vapour Deposition Fundamentals and Technical Aspects

  • Juhn, Hermann A.;
    Forschungsinstitut fur Edelmetalle und Metallchmi;
Abstract

The principles of the physical vapour deposition processes(PVC); evaporation, sputting, and ion plating are presented and compared with each other with respect to coating properties, deposition rate and process control. The significance of coating sources

Keywords