Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 23(1); 1990
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1990;23(1):27-33. Published online: Nov, 30, -0001

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A Thermodynamic Analysis on Silicon Consumption during The Chemical Vapper Deposition of Tungsten

  • 정태희;이정중;
    서울대학교 공과대학 금속공학과;서울대학교 공과대학 금속공학과;
Abstract

Thermodynamic analysis on silicon consumpton during the chemical vapor deposition of tungten was carried out by calculation equilibrium concerations of all possible product species utilizing a computer progrom according to VCS.(Villars-Cruise-Smith) algor

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