Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 23(2); 1990
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1990;23(2):1-10. Published online: Nov, 30, -0001

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Metal-Organic Vapor Phase Epitaxy : A Review II. Process and charactristics

  • 정원국;
    성균관대학교 재료공학과;
Abstract

Metal-Organic Vapor Phase Epitaxy (MOVPE) is an epitaxial process utilizaing ane or more of organometallice as reactnte to grow compound semicond semiconductror layers. MOVPE is basically a cold wall process in which reactants are delivered without reacti

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