Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 23(2); 1990
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1990;23(2):24-29. Published online: Nov, 30, -0001

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The Effects of Process parameters on TiN Films deposited by Ion Plating Technique

  • 백응승;권식철;이상로;이건환;
    한국기계연구소 표면처리 연구소;한국기계연구소 표면처리 연구소;한국기계연구소 표면처리 연구소;한국기계연구소 표면처리 연구소;
Abstract

The TiN filmms were deposited on the stainless steel substrates by BARE techinique in order to investigate the effects of process parameters such as source-to-substate distance (15-35cm), N2 pressure(4$ imes$10-10 -1$ imes$10-3mb)and

Keywords