Oct, 31, 2024

Vol.57 No.5

Current Issue Archives
Search
Advanced Search
Editorial Office

Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 23(4); 1990
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1990;23(4):197-207. Published online: Nov, 30, -0001

PDF

Metal-Organic Vapor Phase Epitaxy III. Atomic Layer Epitaxy

  • 정원국;
    성균관대학교 재료공학과;
Abstract

Atomic layer epitaxy is a relatively new epitaxial pprocess chracterized by the alternate and separate exposure of a susbstrate surface to the reactants contaning the constituent element of a compound semicoductror. The ideal ALE is expected to provide se

Keywords