Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 24(1); 1991
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1991;24(1):1-17. Published online: Nov, 30, -0001

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Metal-Organic Vapor Phase Epitaxy IV. MOVPE and ALE Reaction Mechanisms

  • 정원국;
    성균관대학교 재료공학과;
Abstract

Understanding of the detailed reaction mechanisms during MOVPE and ALE is essential to further improve the properties of the grown crystals and the controllability of the growth parameters. The unified models for the detailed reaction paths are not availa

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