Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 24(2); 1991
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1991;24(2):73-79. Published online: Nov, 30, -0001

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A Study on the Formation of Interface and the Thin Film Microstructure in TiN Deposited by Ion Plating

  • 여종석;이종민;한봉희;
    서울대학교 금속공학과;서울대학교 금속공학과;서울대학교 금속공학과;
Abstract

Recent studies son surface coatings have shown that the change of physical, chemical and crystallographic structure analysed and observed according to the deposition process variables has the effects on the resultant film properties. Under the same prepar

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