Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 24(3); 1991
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1991;24(3):119-124. Published online: Nov, 30, -0001

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Measurement of Ion Energy Distribution using QMS & Ionization Enhancement by usign Magnetic Field in Triod BARE

  • 김익현;주정훈;한봉희;
    서울대학교 금속공학과;서울대학교 금속공학과;서울대학교 금속공학과;
Abstract

Recently, the trend of research in hard coating is concentrate on developing the process of ionization rate under low operating pressure, to get the thin film with high adhesion and dense microstructures. In this study ionization rate enhancement type PVD

Keywords