Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 25(2); 1992
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1992;25(2):90-96. Published online: Nov, 30, -0001

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Microsturctures of copper thin films sputtered onto polyimide

  • Chung, Tae-Gyeong;Kim, Young-Ho;Yu, Jin;
    Dept. of electronic materials science and engineering, KAIST;Dept. of materials engineering, Hanyang university;Dept. of electronic materials science and engineering, KAIST;
Abstract

Thed effects of sputter gas pressure and substrate surface micro-roughness on the microstructure and surface topography have been investigated in the Cu thin films sputter deposited onto polyimide substrates. The surface roughness of polyimide was control

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