Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 25(6); 1992
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1992;25(6):293-298. Published online: Nov, 30, -0001

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Phase Changes of Vanadium Oxide Thin Films

  • 선우진호;신인하;고경현;안재환;
    아주대학교 재료공학과;아주대학교 재료공학과;아주대학교 재료공학과;아주대학교 재료공학과;
Abstract

Various vanadium-oxide thin films were deposited by e-beam and thermal evaporation of V2O5, V2O3, and VO2 powders. Films with thickness of $2000AA$ were subjected to annealing at $300^{circ}C$~$450^{circ}C$ in N2 atmospher

Keywords