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KISE Journal of Korean Institute of Surface Engineering 1992;25(6):299-308. Published online: Nov, 30, -0001
Titanium nitride(TiN) has been synthesized by nitrogen ion irradiation onto the Ti thin film deposited on STD11 and SKH9 tool materials. The effect of irradiation flux and substrate temperature on the formation behavior and mechanical properaties of TiN w
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