Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 26(2); 1993
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1993;26(2):71-81. Published online: Nov, 30, -0001

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The effects of plasma treatment of polyimide surface on the adhesion of chromium/polyimide

  • Chung, Tae-Gyeong;Kim, Young-Ho;Yu, Jin;
    Dept. of Electronic Materials Engineering, KAIST;Dept. of Materials Engineering, Hanyang University;Dept. of Electronic Materials Engineering, KAIST;
Abstract

Thed effects of Ar or Oxygen RF plasma treatment on the adhesion behavior of Cr films to polyimide sub-strates have been investigated by using SEM, XRD, AES, and $90^{circ}$peel test. By applying RF plasma treatment of the polyimide surface

Keywords