Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 27(2); 1994
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1994;27(2):65-73. Published online: Nov, 30, -0001

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Effect of Deposition Parameter on Ionic Conductivity of RF Magnetron Sputtered Li$_2$O-B$_2$O$_3$-SiO$_2$ Solid Electroiyte Films

  • 노남석;권혁상;
    한국과학기술원 재료공학과;한국과학기술원 재료공학과;
Abstract

Effects of deposition parameter on the ionic conductivity and structural change of the Lithium borosili-cate solid electrolyte films, prepared by rf sputtering using 7$LI_2O-3B_2O_3-1SiO_2$ single phase target and also a mosaic target enriched

Keywords