Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 27(6); 1994
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1994;27(6):327-334. Published online: Nov, 30, -0001

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Characteristics of Ar Plasma Excited by Helicon Wave

  • 김태영;정기형;이승학;정재국;
    서울대학교 원자핵공학과;서울대학교 원자핵공학과;중앙대학교 물리학과;중앙대학교 물리학과;
Abstract

This work concerns a research for helicon wave plasma generators with applications to materials pro-cessing. For this end, helicon wave plasma source has been designed, constructed and tested. High density plasma was successfully produced and diagnosed

Keywords