Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 28(1); 1995
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1995;28(1):55-63. Published online: Nov, 30, -0001

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Scanning Tunneling Microscopy (STM)/Atomic Force Microscopy(AFM) Studies of Silicon Surfaces Treated in Alkaline Solutions of Interest to Semiconductor Processing

  • Park, Jin-Goo;
    Hanyang University, Department of Metallurgy and Materials Engineering;
Abstract

Alkaline solutions such as $NH_4$OH, choline and TMAH (($CH_3$)$_4$NOH) have been introduced in semiconductor wet processing of silicon wafers to control ionic and particulate impurities following etching in acidic solutio

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