Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 28(5); 1995
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1995;28(5):267-275. Published online: Nov, 30, -0001

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Effects of Electron Beam Heating(EBH) on the Properties of ion Plated Ti(C, N) Films

  • 김치명;고경현;안재환;배종수;정형식;
    아주대학교 재료공학과;아주대학교 재료공학과;아주대학교 재료공학과;한국기계연구원 재료공정 연구부;한국기계연구원 재료공정 연구부;
Abstract

Electron beam can provide convenient way to heat the substrate during Hollow Cathode Discharge (HCD) ion plating of Ti(C, N)films. Densification of columnar structrue is enhanced by longer duration of electron beam heating(EBH). While strong(111) texture

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