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KISE Journal of Korean Institute of Surface Engineering 1995;28(6):343-351. Published online: Nov, 30, -0001
Titanium nitride films have been prepared on various substrates (silicon wafer, HSS) by cathode arc ion plating process to measure microhardness, adhesion and wear-resistant behaviors by changing the substrate bias voltages (0∼-300V), thickness and roughn
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