Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 29(3); 1996
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1996;29(3):149-156. Published online: Nov, 30, -0001

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Synthesis of Conducting Diamond-Like Carbon Films by Triode Magnetron Sputtering-Chemical Vapor Deposition

  • 태흥식;황기웅;
    경북대학교 전자전기 공학부;서울대학교 전기공학부;
Abstract

Conducting diamond-like carbon films are synthesized using Triode Magnetron Sputtering-Plasma Enhanced Chemical Vapor Deposition(TMS-PECVD), and are examined by four point probe, microhardeness tester, and scanning electron miscroscopy(SEM). As the target

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