Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 29(4); 1996
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1996;29(4):261-267. Published online: Nov, 30, -0001

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The effect of deposition conditions on the adhesion strength of TiN multilayer by D. C. magnetron sputtering

  • 김선규;유정광;이건환;권식철;
    울산대학교 공과대학 금속공학과;대우전자제2연구소;한국기계연구원 박막연구실;한국기계연구원 박막연구실;
Abstract

The characteristics and adhesion strength of TiN layer deposited by D. C. magnetron sputtering were investigated. Three types of TiN layers were deposited on STS304 stainless steel. Scratch tests were performed to determine the effect of deposition temper

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