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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 29(5); 1996
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 1996;29(5):301-313. Published online: Nov, 30, -0001
TEXTURE AND RELATED MICROSTRUCTURE AND SURF ACE TOPOGRAPHY OF VAPOR DEPOSITS
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School of Materials Science and Engineering Seoul National University;
Abstract
The texture of vapor deposits(PVD and CVD) changes from the orientation that places the lowest energy lattice plane parallel to the substrate under the condition of low atom or ion concentration adjacent to the deposit, to the orientation that places the
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