Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 29(5); 1996
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1996;29(5):330-337. Published online: Nov, 30, -0001

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PROPOSE NEW MIXTURE TARGET FOR LOW-TEMPERATURE AND HIGH- RATE DEPOSITION OF PZT THIN FILMS BY REACTIVE SPUTTERING

  • Hata, Tomonobu;Zhang, WeiXiao;Sasaki, Kimihiro;
    Department of Electrical and Computer Engineering, Faculty of Engineering, Kanazawa University;Department of Electrical and Computer Engineering, Faculty of Engineering, Kanazawa University;Department of Electrical and Computer Engineering, Faculty of Eng
Abstract

A rf reactive sputter deposition technique was adopted to deposit ferroelectric lead zirconate titanate (PZT) thin films with high rate from a ZrTi alloy target combined with PbO pellets. Deposition characterisitics including the effects of PbO are ratio

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