Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 29(5); 1996
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1996;29(5):363-370. Published online: Nov, 30, -0001

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SYNTHESIS OF CARBON NITRIDE THIN FILMS BY PLASMA PROCESSING

  • Takai, Osamu;Taki, Yusuke;Kitagawa, Toshihisa;
    Department of Materials Processing Engineering, Nagoya University;Department of Materials Processing Engineering, Nagoya University;Department of Materials Processing Engineering, Nagoya University;
Abstract

Carbon nitride is one of the new carbon materials which show interesting properties. After the theoretical calculation by LIu and Cohen, many researchers are trying to prepare $eta$-$C_3N_4$ which may be harder than diamond. Many ca

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