Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 29(5); 1996
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1996;29(5):393-398. Published online: Nov, 30, -0001

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SOFT MAGNETIC PROPERTIES OF FeTaNC NANOCRYSTALLINE FILMS

  • Koh, Tae-Hyuk;Shin, Dong-Hoon;Choi, Woon;Ahn, Dong-Hoon;Nam, Seoung-Eui;Kim, Hyoung-June;
    Dept. of Met. & Mater. Sci., Hong-ik Univ.;Mater. Sci., Hong-ik Univ.;Mater. Sci., Hong-ik Univ.;Multimedia Lab. LG Electronics;Multimedia Lab. LG Electronics;Multimedia Lab. LG Electronics;
Abstract

Soft magnetic properties and microstructural evolution of FeTaNC films were investigated, and compared with FeTaN and FeTaC films. Effects of substrate species (glass vs. $CaTiO_3$) on the magnetic properties were also investigated. Co-addition

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