Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 29(5); 1996
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1996;29(5):474-477. Published online: Nov, 30, -0001

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SOLID STATE CESIUM ION BEAM SPUTTER DEPOSITION

  • Baik, Bong-Koo;Choi, Dong-Jun;Han, Dong-Won;Kim, Yong-Hwan;Kim, Seong-In;
    Department of Metallurgical Engineering, Yonsei University;Department of Metallurgical Engineering, Yonsei University;Department of Metallurgical Engineering, Yonsei University;Department of Metallurgical Engineering, Yonsei University;SKION Corporation;
Abstract

The solid state cesium ion beam sputter deposition system has been developed for negative carbon ion beam deposition. The negative carbon ion beams are effectively produced by cesium ion bombardment. The C-ion beam current and deposition energy can be ind

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