Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 29(5); 1996
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1996;29(5):482-486. Published online: Nov, 30, -0001

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APPLICATIONS OF SOI DEVICE TECHNOLOGY

  • Ryoo, Kunkul;
    Materials Surface Research Team;
Abstract

The progress of microelectronics technology has been requiring agressive developments of device technologies. Also the requirements of the next generation devices is heading to the limits of their functions and materials, and hence asking the very specif

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