- Past Issues
- e-Submission
-
2021 Impact Factor 1.766
5-Year Impact Factor 1.674
Editorial Office
- +82-2-563-0935
- +82-2-558-2230
- submission@kssse.or.kr
- https://www.kssse.or.kr/
Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 29(5); 1996
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 1996;29(5):498-504. Published online: Nov, 30, -0001
SPUTTER-DEPOSITION OF CARBON NITRIDE FILMS WITH HIGH NITROGEN CONCENTRATION
-
Department of Materials Processing Engineering, Nagoya University;;
Abstract
The synthesis of carbon nitride thin films with high nitrgen concentration was accomplished by reactive supttering at relatively high working pressure. In conventional reactive sputter-deposition of carbon nitride films, working pressure was 0.3-5Pa and
Keywords