Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 29(5); 1996
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1996;29(5):525-531. Published online: Nov, 30, -0001

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CRYSTALLINE PHASES AND HARDNESS OF (Ti$_{1-x}$Al$_{x}$)N COATINGS DEPOSITED BY REACTIVE SPUTTERING

  • Park, Chong-Kwan;Park, Joo-Dong;Oh, Tae-Sung;
    Department of Metallurgy and Materials Science, Hong Ik University;Department of Metallurgy and Materials Science, Hong Ik University;Department of Metallurgy and Materials Science, Hong Ik University;
Abstract

(Ti1-xAlx)N films were deposited on high speed steel and silicon substrates by reactive sputtering in mixed $Ar-N_2$ discharges. Crystalline phases and microhardness of ($Ti_1_xAl_x$)N films were investigated with variation of the fi

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