Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 29(5); 1996
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1996;29(5):549-555. Published online: Nov, 30, -0001

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NITROGEN DOPED DIAMOND LIKE CARBON FILM SYNTHESIZED BY MICROWAVE PLASMA CVD

  • Urao, Ryoichi;Hayatsu, Osamu;Satoh, Toshihiro;Yokota, Hitoshi;
    Materials Science, School of Engineering, Ibaraki University;Graduate School, Ibaraki University;Materials Science, School of Engineering, Ibaraki University;Materials Science, School of Engineering, Ibaraki University;
Abstract

Diamond Like Carbon film is amorphous film which is considered to consist of three coordinate graphite structure and tetrahedron coordinate diamond structure. Its hardness, thermal conductivity and chemical stability are nearly to one of diamond. It is we

Keywords